Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology
spiedigitallibrary.org
Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology
As scaling in semiconductor devices continues, the aspect ratios of deep trench isolation (DTI) structures have increased. DTI structures are used in power devices, power management ICs and image sensors as a method to isolate active devices by reducing crosstalk, parasitic capacitance, latch-up and allowing for an increase breakdown voltage of ...
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